Inkqubo yokuCoca kunye nokuHlambulula iSulfur ye-6N Ultra-High-Purity eneParameters ezineenkcukacha

Iindaba

Inkqubo yokuCoca kunye nokuHlambulula iSulfur ye-6N Ultra-High-Purity eneParameters ezineenkcukacha

Ukuveliswa kwe-6N (≥99.9999% yobumsulwa) i-sulfur ecocekileyo kakhulu ifuna i-distillation enezigaba ezininzi, i-deep adsorption, kunye ne-ultra-clean filtration ukuze kususwe ii-trace metals, ukungcola kwezinto eziphilayo, kunye nee-particles. Apha ngezantsi kukho inkqubo yobukhulu bemizi-mveliso edibanisa i-vacuum distillation, i-microwave-assisted cleansing, kunye netekhnoloji yokuchaneka emva konyango.


I. Unyango lwangaphambi kokusetyenziswa kwezinto eziluhlaza kunye nokususwa kokungcola

‌1. Ukukhethwa kwezinto eziluhlaza kunye nonyango lwangaphambi kwexesha

  • Iimfuno‌: Ubumsulwa besalfure bokuqala ≥99.9% (udidi lwe-3N), ukungcola kwesinyithi okupheleleyo ≤500 ppm, umxholo wekhabhoni yendalo ≤0.1%.
  • Ukunyibilika okuxhaswa yi-microwave‌:
    I-sulfur ekrwada icutshungulwa kwi-reactor ye-microwave (i-frequency ye-2.45 GHz, amandla e-10–15 kW) kwi-140–150°C. Ukujikeleza kwe-dipole okubangelwa yi-microwave kuqinisekisa ukunyibilika ngokukhawuleza ngelixa kubola ukungcola okuphilayo (umz., iikhompawundi ze-tar). Ixesha lokunyibilika: imizuzu engama-30–45; ubunzulu bokungena kwi-microwave: 10–15 cm
  • Ukuhlamba Amanzi Angenazo I-ionized‌:
    I-sulfur enyibilikisiweyo ixutywa namanzi anyibilikisiweyo (i-resistivity ≥18 MΩ·cm) kumlinganiselo we-1:0.3 mass kwi-reactor eshukunyisiweyo (120°C, uxinzelelo lwe-bar ezi-2) iyure e-1 ukususa iityuwa ezinyibilikayo emanzini (umz., i-ammonium sulfate, i-sodium chloride). Isigaba samanzi siyasuswa kwaye sisetyenziswe kwakhona kangangemijikelo emi-2-3 de kube yi-conductivity ≤5 μS/cm.

2. Ukufunxwa kunye nokuhluzwa kweZiteji ezininzi

  • Umhlaba weDiatomaceous/Ukufunxwa kweKhabhoni eVuselelweyo‌:
    Umhlaba we-diatomaceous (0.5–1%) kunye ne-activated carbon (0.2–0.5%) zongezwa kwi-sulfur enyibilikisiweyo phantsi kokhuseleko lwe-nitrogen (130°C, ukuxutywa iiyure ezi-2) ukuze zifunxe ii-complexes zesinyithi kunye nezinto eziphilayo ezisele.
  • Ukucoca Okuchanekileyo Kakhulu‌:
    Ukucoca okunezigaba ezibini kusetyenziswa izihluzi ze-titanium sintered (ubungakanani be-pore ye-0.1 μm) kuxinzelelo lwenkqubo ye-≤0.5 MPa. Inani lamasuntswana emva kokucoca: ≤10 amasuntswana/L (ubukhulu >0.5 μm).

II. Inkqubo yokuCoca iVacuum eneZigaba ezininzi

‌1. Ukucoca okuPhambili (Ukususwa kokungcola kwesinyithi)‌

  • IzixhoboIkholamu yokunyibilikisa i-quartz ecocekileyo kakhulu ene-316L stainless steel packing (≥15 theoretical plates), i-vacuum ≤1 kPa.
  • Iiparameters zokusebenza‌:
  • Ubushushu bokutya‌: 250–280°C (isulfur iyabila kwi-444.6°C phantsi koxinzelelo lwemozulu; i-vacuum inciphisa iqondo lokubila liye kwi-260–300°C).
  • Umlinganiselo weReflux‌: 5:1–8:1; ukutshintshatshintsha kobushushu obuphezulu bekholamu ≤±0.5°C.
  • Imveliso‌: Ubumsulwa besalfure edityanisiweyo ≥99.99% (umgangatho we-4N), ukungcola kwesinyithi okupheleleyo (i-Fe, i-Cu, i-Ni) ≤1 ppm.

‌2. Ukususwa kokungcola kweMolekyuli yesibini (Ukususwa kokungcola kwendalo)‌

  • Izixhobo‌: Isixhobo sokucoca iimolekyuli esifutshane esinesithuba se-10–20 mm sokukhupha umphunga kunye nokufuma, ubushushu bokufuma bube yi-300–320°C, i-vacuum ≤0.1 Pa.
  • Ukwahlukana Kobumdaka‌:
    Izinto eziphilayo ezibila kancinci (umz., iithioethers, iithiophene) ziyaphehlwa kwaye zikhutshwe, ngelixa ukungcola okubilayo kakhulu (umz., iipolyaromatics) kuhlala kwiintsalela ngenxa yokwahluka kwendlela ekhululekileyo yeemolekyuli.
  • Imveliso‌: Ubumsulwa besalfure ≥99.999% (ibanga le-5N), ikhabhoni yendalo ≤0.001%, izinga lentsalela <0.3%.

‌3. Ukucocwa kweNdawo ePhakamileyo (Ukufezekisa ubunyulu be-6N)‌

  • Izixhobo‌: Isicoci sendawo ethe tye esinolawulo lobushushu beendawo ezininzi (± 0.1°C), isantya sokuhamba sendawo yi-1–3 mm/h.
  • Ukwahlulwahlulwa‌:
    Ukusebenzisa ii-coefficients zokwahlulwahlulwa (K=Csolid/CliquidK=Ceqinileyo​/Culwelo​), indawo engama-20–30 idlula iimetali ezixineneyo (As, Sb) ekupheleni kwe-ingot. I-10–15% yokugqibela ye-ingot yesulfure iyalahlwa.

III. Ukwenziwa Emva Konyango kunye Nokucocwa Kakhulu

‌1. Ukukhupha iSolvent ecocekileyo kakhulu

  • Ukukhupha i-Ether/Carbon Tetrachloride‌:
    I-Sulfur ixutywa ne-ether ye-chromatographic-grade (1:0.5 volume ratio) phantsi koncedo lwe-ultrasonic (40 kHz, 40°C) imizuzu engama-30 ukususa izinto eziphilayo ezi-trace polar.
  • Ukubuyiselwa kweSolvent‌:
    Ukufunxwa kwesihluzo semolekyuli kunye nokucocwa kwevacuum kunciphisa iintsalela zesinyibilikisi ukuya kwi-≤0.1 ppm.

‌2. I-Ultrafiltration kunye ne-Ion Exchange‌

  • Ukucoca nge-PTFE Membrane Ultrafiltration‌:
    I-sulfur enyibilikisiweyo ihluzwa ngee-membrane ze-PTFE ze-0.02 μm kwi-160–180°C kunye noxinzelelo lwe-≤0.2 MPa.
  • IiResins zoTshintshiselwano lweeIon‌:
    Ii-resin ze-Chelating (umz., i-Amberlite IRC-748) zisusa ii-ion zesinyithi ezikwinqanaba le-ppb (Cu²⁺, Fe³⁺) kwizinga lokuhamba kwe-1–2 BV/h.

‌3. Ukwenziwa kweNdalo ecocekileyo kakhulu

  • I-Atomization yeGesi engasebenziyo‌:
    Kwigumbi lokucoca leKlasi le-10, i-sulfur enyibilikisiweyo ifakwa kwi-atom nge-nitrogen (uxinzelelo lwe-0.8–1.2 MPa) ukuya kwiigranules ezingqukuva ze-0.5–1 mm (ukufuma <0.001%).
  • Ukupakishwa kweVacuum‌:
    Imveliso yokugqibela ivalwa nge-vacuum kwifilimu ye-aluminium composite phantsi kwe-argon ecocekileyo kakhulu (≥99.9999% ubumsulwa) ukuthintela i-oxidation.

IV. Iiparameter zeNkqubo ePhambili

Inqanaba leNkqubo

Ubushushu (°C)

Uxinzelelo

Ixesha/Isantya

Izixhobo eziphambili

Ukunyibilika kweMicrowave

140–150

Indalo

imizuzu engama-30–45

Isixhobo sokuphendula kwi-microwave

Ukuhlamba Amanzi Angenazo I-ionized

120

Ibha ezi-2

Iyure e-1/umjikelo

I-Reactor evuselelayo

Ukucoca iimolekyuli

300–320

≤0.1 Pa

Iqhubekeka

I-Distiller yeMolecular yeNdlela emfutshane

Ukucocwa kweNdawo

115–120

Indalo

1–3 mm/h

Umcoci weNdawo ethe tye

Ukucoca nge-PTFE Ultra

160–180

≤0.2 MPa

Ukuhamba kwe-1–2 m³/h

Isihluzi sobushushu obuphezulu

Ukwenziwa kweNitrogen

160–180

0.8–1.2 MPa

Iigranule eziyi-0.5–1 mm

Inqaba yokwenziwa kwe-atomization


V. Ulawulo loMgangatho kunye noVavanyo

  1. Uhlalutyo loBumdaka bokulandelela‌:
  • I-GD-MS (i-Glow Discharge Mass Spectrometry)‌: Ifumana iintsimbi kwi ≤0.01 ppb.
  • Isihlalutyi seTOC‌: Ilinganisa i-carbon yendalo ≤0.001 ppm.
  1. Ulawulo lobungakanani beenxalenye‌:
    I-laser diffraction (Mastersizer 3000) iqinisekisa ukuphambuka kwe-D50 ≤±0.05 mm.
  2. Ucoceko Lomphezulu‌:
    I-XPS (i-X-ray Photoelectron Spectroscopy) iqinisekisa ubukhulu be-oxide yomphezulu ≤1 nm.

VI. Uyilo loKhuseleko kunye nokusingqongileyo

  1. Ukuthintela Ukuqhuma‌:
    Izixhobo zokubona ilangatye ezisebenzisa i-infrared kunye neenkqubo ze-nitrogen ezikhukulayo zigcina amanqanaba eoksijini <3%
  2. Ulawulo lokukhupha ukungcola‌:
  • Iigesi ze-asidi‌: Ukuhlafuna i-NaOH enamanqanaba amabini (20% + 10%) kususa i-≥99.9% H₂S/SO₂.
  • IiVOCI-Zeolite rotor + RTO (850°C) inciphisa ii-hydrocarbons ezingezizo ze-methane ukuya kwi-≤10 mg/m³.
  1. Ukuphinda kusetyenziswe inkunkuma‌:
    Ukunciphisa ubushushu obuphezulu (1200°C) kubuyisela iintsimbi; intsalela yesalfure ingaphantsi kwe-0.1%.

VII. IiMetriki zeTekhnoloji-yoQoqosho

  • Ukusetyenziswa kwamandlaUmbane we-800–1200 kWh kunye neetoni ezi-2–3 zomphunga ngetoni nganye yesalfure ye-6N.
  • Yima kancinci‌: Ukubuyiswa kwesalfure ≥85%, izinga lentsalela <1.5%.
  • IxabisoIindleko zemveliso ~120,000–180,000 CNY/ton; ixabiso lemarike yi-250,000–350,000 CNY/ton (udidi lwe-semiconductor).

Le nkqubo ivelisa i-6N sulfur kwi-semiconductor photoresists, ii-III-V compound substrates, kunye nezinye izicelo eziphambili. Ukubeka esweni ngexesha langempela (umz., uhlalutyo lwezinto ze-LIBS) kunye nokulinganiswa kwegumbi lokucoca le-ISO Class 1 kuqinisekisa umgangatho ohambelanayo.

Imibhalo esemazantsi

  1. Isalathiso 2: Imigangatho yokuCoca iSulfur yoShishino
  2. Isalathiso 3: Iindlela zokucoca eziPhambili kwiNjineli yeKhemikhali
  3. Isalathiso 6: Incwadi Yokucwangciswa Kwezinto Ezicocekileyo Kakhulu
  4. Isalathiso 8: IiProtokholi zeMveliso yeeKhemikhali zeSemiconductor-Grade
  5. Isalathiso 5: Ukuphucula iVacuum Distillation

Ixesha leposi: Epreli-02-2025